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Journals

Data-efficient prediction of sputtering power and pressure from microstructures of aluminum thin films

관리자 2026-08-03 조회수 38
Hyun Seok Choi1, JuHyung Song,Joonseok Park, Yoon-Seok Noh, In-Sung Lee, Young Joon Yoo, Jin Pyung Kim*,Dongpyo Hong*, Sang Yoon Park*

Materials Today Communications, 2026



DOI : 10.1016/j.mtcomm.2026.115792