Data-efficient prediction of sputtering power and pressure from microstructures of aluminum thin films
Hyun Seok Choi1, JuHyung Song,Joonseok Park, Yoon-Seok Noh, In-Sung Lee, Young Joon Yoo, Jin Pyung Kim*,Dongpyo Hong*, Sang Yoon Park*
Materials Today Communications, 2026
DOI : 10.1016/j.mtcomm.2026.115792